Insulated gate and surface passivation structures for GaN-based power transistors

Z Yatabe, JT Asubar, T Hashizume - Journal of Physics D …, 2016 - iopscience.iop.org
Recent years have witnessed GaN-based devices delivering their promise of
unprecedented power and frequency levels and demonstrating their capability as an able …

Electronic surface and dielectric interface states on GaN and AlGaN

BS Eller, J Yang, RJ Nemanich - … of Vacuum Science & Technology A, 2013 - pubs.aip.org
GaN and AlGaN have shown great potential in next-generation high-power electronic
devices; however, they are plagued by a high density of interface states that affect device …

Present status and future prospect of widegap semiconductor high-power devices

H Okumura - Japanese journal of applied physics, 2006 - iopscience.iop.org
High-power device technology is a key technological factor for wireless communication,
which is one of the information network infrastructures in the 21st century, as well as power …

State of the art on gate insulation and surface passivation for GaN-based power HEMTs

T Hashizume, K Nishiguchi, S Kaneki, J Kuzmik… - Materials science in …, 2018 - Elsevier
In this article, we review recent progress on AlGaN/GaN and InAlN/GaN metal-insulator-
semiconductor high-electron-mobility transistors (MIS-HEMTs) using Al-based oxides, nitride …

Origin and control of OFF-state leakage current in GaN-on-Si vertical diodes

Y Zhang, M Sun, HY Wong, Y Lin… - … on Electron Devices, 2015 - ieeexplore.ieee.org
Conventional GaN vertical devices, though promising for high-power applications, need
expensive GaN substrates. Recently, low-cost GaN-on-Si vertical diodes have been …

Process conditions for improvement of electrical properties of Al2O3/n-GaN structures prepared by atomic layer deposition

Y Hori, C Mizue, T Hashizume - Japanese Journal of Applied …, 2010 - iopscience.iop.org
The effects of fabrication processes on the electrical properties of Al 2 O 3/GaN structures
prepared by atomic layer deposition were investigated. The annealing process at 800 C for …

GaN-based power high-electron-mobility transistors on Si substrates: from materials to devices

N Wu, Z Xing, S Li, L Luo, F Zeng… - … Science and Technology, 2023 - iopscience.iop.org
Conventional silicon (Si)-based power devices face physical limitations—such as switching
speed and energy efficiency—which can make it difficult to meet the increasing demand for …

Effects of postmetallization annealing on interface properties of Al2O3/GaN structures

T Hashizume, S Kaneki, T Oyobiki, Y Ando… - Applied Physics …, 2018 - iopscience.iop.org
In this study, we investigated the effects of postmetallization annealing (PMA) on the
interface properties of GaN metal–oxide–semiconductor (MOS) structures using Al 2 O 3 …

Highly-stable and low-state-density Al2O3/GaN interfaces using epitaxial n-GaN layers grown on free-standing GaN substrates

S Kaneki, J Ohira, S Toiya, Z Yatabe, JT Asubar… - Applied physics …, 2016 - pubs.aip.org
Interface characterization was carried out on Al 2 O 3/GaN structures using epitaxial n-GaN
layers grown on free-standing GaN substrates with relatively low dislocation density (< 3× 10 …

AlGaN/GaN MIS-HEMT with PECVD SiNx, SiON, SiO2 as Gate Dielectric and Passivation Layer

K Geng, D Chen, Q Zhou, H Wang - Electronics, 2018 - mdpi.com
Three different insulator layers SiNx, SiON, and SiO2 were used as a gate dielectric and
passivation layer in AlGaN/GaN metal–insulator–semiconductor high-electron-mobility …