Pulsed plasma etching for semiconductor manufacturing

DJ Economou - Journal of Physics D: Applied Physics, 2014 - iopscience.iop.org
Power-modulated (pulsed) plasmas have demonstrated several advantages compared to
continuous wave (CW) plasmas. Specifically, pulsed plasmas can result in a higher etching …

Physics and engineering of singlet delta oxygen production in low-temperature plasma

AA Ionin, IV Kochetov, AP Napartovich… - Journal of Physics D …, 2007 - iopscience.iop.org
An overview is presented of experimental and theoretical research in the field of physics and
engineering of singlet delta oxygen (SDO) production in low-temperature plasma of various …

Kinetics of plasma-assisted combustion: effect of non-equilibrium excitation on the ignition and oxidation of combustible mixtures

NA Popov - Plasma Sources Science and Technology, 2016 - iopscience.iop.org
Kinetics of plasma-assisted combustion: effect of non-equilibrium excitation on the ignition and
oxidation of combustible mixtures - IOPscience Skip to content IOP Science home Accessibility …

Modelling N2–O2 plasmas: volume and surface kinetics

V Guerra, A Tejero-del-Caz… - … Sources Science and …, 2019 - iopscience.iop.org
This paper reviews the basics of kinetic modelling in low-temperature N 2–O 2 plasmas,
including the strong coupling between electron, vibrational, chemical and surface kinetics …

[HTML][HTML] The lisbon kinetics monte carlo solver

TC Dias, A Tejero-del-Caz, LL Alves… - Computer Physics …, 2023 - Elsevier
Abstract The LisbOn KInetics Monte Carlo (LoKI-MC) is an open-source simulation tool that
solves the electron kinetics for low-temperature plasmas excited by uniform DC electric …

Improved volume-averaged model for steady and pulsed-power electronegative discharges

S Kim, MA Lieberman, AJ Lichtenberg… - Journal of Vacuum …, 2006 - pubs.aip.org
An improved volume-averaged global model is developed for a cylindrical (radius R⁠,
length L⁠) electronegative (EN) plasma that is applicable over a wide range of electron …

Kinetics of highly vibrationally excited O2 (X) molecules in inductively-coupled oxygen plasmas

A Annušová, D Marinov, JP Booth… - Plasma Sources …, 2018 - iopscience.iop.org
The high degree of vibrational excitation of O 2 ground state molecules recently observed in
inductively coupled plasma discharges is investigated experimentally in more detail and …

Insights into the limitations to vibrational excitation of CO2: validation of a kinetic model with pulsed glow discharge experiments

O Biondo, C Fromentin, T Silva, V Guerra… - Plasma Sources …, 2022 - iopscience.iop.org
Vibrational excitation represents an efficient channel to drive the dissociation of CO 2 in a
non-thermal plasma. Its viability is investigated in low-pressure pulsed discharges, with the …

Uncertainty and error in complex plasma chemistry models

MM Turner - Plasma Sources Science and Technology, 2015 - iopscience.iop.org
Chemistry models that include dozens of species and hundreds to thousands of reactions
are common in low-temperature plasma physics. The rate constants used in such models …

Oxygen (3P) atom recombination on a Pyrex surface in an O2 plasma

JP Booth, O Guaitella, A Chatterjee… - Plasma Sources …, 2019 - iopscience.iop.org
The recombination of O (3 P) atoms on the surface of a Pyrex tube containing a DC glow
discharge in pure O 2 was studied over a wide range of pressure (0.2–10 Torr) and …