In plasma-based deposition processing, the importance of low-energy ion bombardment
during thin film growth can hardly be exaggerated. Ion bombardment is an important …

Cathodic vacuum arc is a deposition technique which exhibits unique properties, such as
high ion energy, high ionization rate and multiple ion charge states, depending on the …

The vacuum arc is a rich source of highly ionized metal plasma that can be used to make a
high current metal ion source. Vacuum arc ion sources have been developed for a range of …

We have investigated the charge state distributions of metal ions produced in a high current
vacuum arc plasma located in a strong magnetic field. The arc current was varied over the …

We report measurements of ion energy distributions of ionized species in titanium and
aluminium filtered cathodic vacuum arcs operating in oxygen and nitrogen gas …

Cathodic vacuum arc plasmas are known to contain multiply charged ions. Twenty years
after'Pressure ionization: its role in metal vapour vacuum arc plasmas and ion sources' …

We report on measurements of the charge state distributions of ions formed in a vacuum arc
plasma in a magnetic field. A vacuum arc ion source was used for plasma formation and ion …

The vacuum arc ion source has evolved over the past 20 years into a standard laboratory
tool for the production of high current beams of metal ions, and is now used in a number of …

This paper is devoted to the engineering embodiment of the modern methods for producing
charged ion and electron beams by extracting them from the plasma of a discharge. Electron …

This paper reviews the experimental study, development, and improvement of various types
of processing ion sources undertaken in association with the joint program performed in …