How to control solid state dewetting: A short review

F Leroy, F Cheynis, Y Almadori, S Curiotto… - Surface Science …, 2016 - Elsevier
In the past decade there have been many theoretical and experimental efforts to study the
mechanisms of solid state dewetting, that means the spontaneous agglomeration of a thin …

Surface-energy-driven dewetting theory of silicon-on-insulator agglomeration

DT Danielson, DK Sparacin, J Michel… - Journal of applied …, 2006 - pubs.aip.org
The thermal agglomeration of ultrathin (< 30 nm) single crystal silicon-on-insulator (SOI)
films is a morphological evolution phenomenon with practical and scientific importance. This …

Wafer Scale Formation of Monocrystalline Silicon-Based Mie Resonators via Silicon-on-Insulator Dewetting

M Abbarchi, M Naffouti, B Vial, A Benkouider… - ACS …, 2014 - ACS Publications
Subwavelength-sized dielectric Mie resonators have recently emerged as a promising
photonic platform, as they combine the advantages of dielectric microstructures and metallic …

Surface diffusion dewetting of thin solid films: Numerical method and application to

E Dornel, JC Barbe, F De Crécy, G Lacolle… - Physical Review B …, 2006 - APS
A method has been developed to calculate and use a surface chemical potential which is
valid in the large curvature regime for any surface energy function. It is applied to the solid …

Templated solid‐state dewetting of thin silicon films

M Naffouti, T David, A Benkouider, L Favre, A Delobbe… - Small, 2016 - Wiley Online Library
Thin film dewetting can be efficiently exploited for the implementation of functionalized
surfaces over very large scales. Although the formation of sub‐micrometer sized crystals via …

Dynamics, anisotropy, and stability of silicon-on-insulator dewetting fronts

F Leroy, F Cheynis, T Passanante, P Müller - Physical Review B—Condensed …, 2012 - APS
We report on the anisotropy of solid state dewetting of straight fronts of Si (001)/SiO 2
obtained by electron beam lithography. The〈 110〉 front is stable. It recedes with formation …

Dynamics and instability of solid-state dewetting

F Cheynis, F Leroy, P Müller - Comptes …, 2013 - comptes-rendus.academie-sciences …
F. Cheynis et al./CR Physique 14 (2013) 578–589 579 par couche limité par la nucléation
bidimensionnelle sur la face sommitale du bourrelet,(iii) le mécanisme final de génération …

Pattern-induced alignment of silicon islands on buried oxide layer of silicon-on-insulator structure

Y Ishikawa, Y Imai, H Ikeda, M Tabe - Applied physics letters, 2003 - pubs.aip.org
Alignment control of Si islands thermally agglomerated on a buried SiO 2 layer of a silicon-
on-insulator (SOI) structure is reported. As a starting structure, a line-shaped (001) SOI layer …

Solid-state dewetting of single-crystal silicon on insulator: effect of annealing temperature and patch size

M Abbarchi, M Naffouti, M Lodari, M Salvalaglio… - Microelectronic …, 2018 - Elsevier
We address the solid state dewetting of ultra-thin and ultra-large patches of monocrystalline
silicon on insulator. We show that the underlying instability of the thin Si film under …

[HTML][HTML] Rim nucleation and step-train orientation effects in SOI (111) dewetting

S Curiotto, P Müller, F Cheynis, I Ozerov, F Leroy - Surfaces and Interfaces, 2024 - Elsevier
We demonstrate that the step-train orientation of a vicinal surface plays an important role in
solid-state dewetting. Focusing on SOI (111), we observe the formation of hexagonal voids …