Technologies for cofabricating MEMS and electronics
Microfabrication technologies initially developed for integrated electronics have been
successfully applied to batch-fabricate a wide variety of micromechanical structures for …
successfully applied to batch-fabricate a wide variety of micromechanical structures for …
MEMS for distributed wireless sensor networks
BA Warneke, KSJ Pister - 9th international conference on …, 2002 - ieeexplore.ieee.org
MEMS technology is enabling the development of inexpensive, autonomous wireless sensor
nodes with volumes ranging from cubic mm to several cubic cm. These tiny sensor nodes …
nodes with volumes ranging from cubic mm to several cubic cm. These tiny sensor nodes …
[图书][B] Handbook of sensor networks: compact wireless and wired sensing systems
As the field of communications networks continues to evolve, the challenging area of
wireless sensor networks is rapidly coming of age. Recent advances have made it possible …
wireless sensor networks is rapidly coming of age. Recent advances have made it possible …
[图书][B] Mechanical microsensors
M Elwenspoek, RJ Wiegerink - 2001 - books.google.com
This book on mechanical microsensors is based on a course organized by the Swiss
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …
Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and …
Micro resonant force gauges
HAC Tilmans, M Elwenspoek, JHJ Fluitman - Sensors and Actuators A …, 1992 - Elsevier
A review of micro resonant force gauges is presented. A theoretical description is given of
gauges operating in a flexural mode of vibration, including a discussion of non-linear effects …
gauges operating in a flexural mode of vibration, including a discussion of non-linear effects …
Tin oxide gas sensor fabricated using CMOS micro-hotplates and in-situ processing
JS Suehle, RE Cavicchi, M Gaitan… - IEEE Electron Device …, 1993 - ieeexplore.ieee.org
A monolithic tin oxide (SnO/sub 2/) gas sensor realized by commercial CMOS foundry
fabrication (MOSIS) and postfabrication processing techniques is reported. The device is …
fabrication (MOSIS) and postfabrication processing techniques is reported. The device is …
Large suspended inductors on silicon and their use in a 2-mu m CMOS RF amplifier
JYC Chang, AA Abidi, M Gaitan - IEEE Electron Device Letters, 1993 - ieeexplore.ieee.org
Large spiral inductors encased in oxide over silicon are shown to operate beyond the UHF
band when the capacitance and loss resistance are greatly reduced by selective removal of …
band when the capacitance and loss resistance are greatly reduced by selective removal of …
Laminated high-aspect-ratio microstructures in a conventional CMOS process
Electrostatically actuated microstructures with high-aspect-ratio laminated-beam
suspensions have been fabricated using a 0.8 μm three-metal CMOS process followed by a …
suspensions have been fabricated using a 0.8 μm three-metal CMOS process followed by a …
[图书][B] The VLSI handbook
WK Chen - 1999 - taylorfrancis.com
Over the years, the fundamentals of VLSI technology have evolved to include a wide range
of topics and a broad range of practices. To encompass such a vast amount of knowledge …
of topics and a broad range of practices. To encompass such a vast amount of knowledge …
A monolithic CMOS microhotplate-based gas sensor system
MY Afridi, JS Suehle, ME Zaghloul… - IEEE Sensors …, 2002 - ieeexplore.ieee.org
A monolithic CMOS microhotplate-based conductance-type gas sensor system is described.
A bulk micromachining technique is used to create suspended microhotplate structures that …
A bulk micromachining technique is used to create suspended microhotplate structures that …