Origins and mechanisms of bias instability noise in a three-axis mode-matched MEMS gyroscope

T Hiller, Z Pentek, JT Liewald… - Journal of …, 2019 - ieeexplore.ieee.org
In this paper, we examine the origins of bias instability in three-axis, mode-matched MEMS
gyroscopes. Reducing this drift phenomenon is crucial for highly accurate navigation in …

A micro oven-control system for inertial sensors

D Yang, JK Woo, S Lee, J Mitchell… - Journal of …, 2017 - ieeexplore.ieee.org
This paper presents a modular and generic micromachined oven-control system for use with
miniature micro-electro-mechanical system (MEMS) transducers. The micro-oven-controlled …

A novel tri-axial MEMS gyroscope calibration method over a full temperature range

H Yang, B Zhou, L Wang, H Xing, R Zhang - Sensors, 2018 - mdpi.com
The micro-electro-mechanical inertial measurement unit (MEMS-IMU) has gradually become
a research hotspot in the field of mid-low navigation, because of its advantages of low cost …

A digital control structure for Lissajous frequency-modulated mode MEMS gyroscope

X Wang, X Zheng, Y Shen, C Xia, G Liu… - IEEE Sensors …, 2022 - ieeexplore.ieee.org
This article proposes a digital control structure for a doubly decoupled gyroscope working in
the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops …

Calibration of coupling errors for scale factor nonlinearity improvement in navigation-grade honeycomb disk resonator gyroscope

P Wang, Q Li, Y Xu, Y Zhang, X Xi, Y Wu… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
With the performance of micromechanical gyroscopes approaching navigation grade, the
scale factor nonlinearity is gradually becoming the limitation for high-performance …

Enhanced temperature stability of scale factor in MEMS gyroscope based on multi parameters fusion compensation method

J Cui, G Yan, Q Zhao - Measurement, 2019 - Elsevier
Scale factor thermal sensitivity is an essential performance index of microelectromechanical
system (MEMS) gyroscopes and is typically used to characterize the temperature stability of …

Noise contributions in a closed-loop MEMS gyroscope for automotive applications

T Hiller, B Kuhlmann, A Buhmann… - 2017 IEEE International …, 2017 - ieeexplore.ieee.org
This paper reports on zero-rate noise contributions in a closed-loop MEMS vibratory
gyroscope. In particular, we are investigating sources and composition of bias instability …

An automatic Q-factor matching method for eliminating 77% of the ZRO of a MEMS vibratory gyroscope in rate mode

J Ren, T Zhou, Y Zhou, Y Li, Y Su - Microsystems & Nanoengineering, 2024 - nature.com
Mismatching quality factors (Q-factors) is one of the main factors causing zero-rate output
(ZRO) in degenerate (DE) Micro-Electro-Mechanical Systems (MEMS) vibratory gyroscopes …

Root-causes of bias instability noise in mode-split MEMS gyroscopes

M Vujadinović, T Hiller, T Balslink… - Journal of …, 2024 - ieeexplore.ieee.org
This paper presents a general instability model of mode-split MEMS gyroscopes. The
proposed model can accurately predict the bias instability of a given device based on the …

In-run scale factor compensation for MEMS gyroscope without calibration and fitting

J Jia, X Ding, Z Qin, Z Ruan, H Li - IEEE Sensors Journal, 2020 - ieeexplore.ieee.org
This paper presents an in-run scale factor error compensation for the micro-electro-
mechanical system (MEMS) gyroscope without system calibration and data fitting. The …