Recent developments in miniaturized sensors, digital processors and wireless
communication systems have many desirable applications. The realization of these …

A piezoelectrically driven hydraulic amplification microvalve for use in compact high-
performance hydraulic pumping systems was designed, fabricated, and experimentally …

A piezohydraulic pump is presented that makes use of the step-and-repeat capability of
piezoelectric actuators. This work discusses piezohydraulic pumping theory, pump design …

In this two-part paper, the optimization of the electromechanical coupling coefficient for thin-
film piezoelectric devices is investigated both analytically and experimentally. The …

The fabrication of an active MEMS microvalve driven by integrated bulk single crystal
piezoelectric actuators is reported. The valve has a nine-layer structure composed of glass …

Wireless sensor networks become increasingly important for structural health monitoring
and other related applications. Consequently, energy harvesters to convert environment …

ABSTRACT A piezoelectrically driven fluidic micropump was fabricated and tested.
Microelectromechanical systems (MEMS) fabrication technology was used. Small cylindrical …

In this paper, thin film (10μm) nickel–titanium (NiTi) shape memory alloy (SMA) was used to
develop a compact actuator pump generating high output force at large velocities. The …

A simple quasi-static model has been developed as an engineering tool for improving the
performance of a piezo-hydraulic actuator's fluid system. The model's predictions compare …

Piezohydraulic and piezopneumatic frequency rectification is analyzed with a steady-state
model of work and energy transfer. In this paper, piezohydraulic actuation is defined as the …