MEMS technology for timing and frequency control
CTC Nguyen - IEEE transactions on ultrasonics, ferroelectrics …, 2007 - ieeexplore.ieee.org
An overview on the vise of microelectromechanical systems (MEMS) technologies for timing
and frequency control is presented. In particular, micromechanical RF filters and reference …
and frequency control is presented. In particular, micromechanical RF filters and reference …
A review on coupled bulk acoustic wave MEMS resonators
With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …
MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
Overview and analysis of MEMS Coriolis vibratory ring gyroscope
J Jia, X Ding, Z Qin, Z Ruan, W Li, X Liu, H Li - Measurement, 2021 - Elsevier
Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …
Quantum limit of quality factor in silicon micro and nano mechanical resonators
Micromechanical resonators are promising replacements for quartz crystals for timing and
frequency references owing to potential for compactness, integrability with CMOS fabrication …
frequency references owing to potential for compactness, integrability with CMOS fabrication …
Limits of quality factor in bulk-mode micromechanical resonators
SA Chandorkar, M Agarwal, R Melamud… - 2008 IEEE 21st …, 2008 - ieeexplore.ieee.org
In this paper we present the dominant energy loss mechanisms and quality factor (Q) limits
in bulk mode micromechanical resonators. We demonstrate that in resonators with an …
in bulk mode micromechanical resonators. We demonstrate that in resonators with an …
Frequency stability of wafer-scale film encapsulated silicon based MEMS resonators
The stability of resonant frequency for single wafer, thin-film encapsulated silicon MEMS
resonators was investigated for both long-term operation and temperature cycling. The …
resonators was investigated for both long-term operation and temperature cycling. The …
Electronically temperature compensated silicon bulk acoustic resonator reference oscillators
K Sundaresan, GK Ho, S Pourkamali… - IEEE Journal of Solid …, 2007 - ieeexplore.ieee.org
The paper describes the design and implementation of an electronically temperature
compensated reference oscillator based on capacitive silicon micromechanical resonators …
compensated reference oscillator based on capacitive silicon micromechanical resonators …
High-frequency thermally actuated electromechanical resonators with piezoresistive readout
A Rahafrooz, S Pourkamali - IEEE Transactions on Electron …, 2011 - ieeexplore.ieee.org
This paper presents fabrication, characterization, and modeling of micro/
nanoelectromechanical high-frequency resonators actuated using thermal forces with …
nanoelectromechanical high-frequency resonators actuated using thermal forces with …
Microelectromechanical resonators for radio frequency communication applications
J Basu, TK Bhattacharyya - Microsystem technologies, 2011 - Springer
Over the past few years, microelectromechanical system (MEMS) based on-chip resonators
have shown significant potential for sensing and high frequency signal processing …
have shown significant potential for sensing and high frequency signal processing …