Laser scanners have been an integral part of MEMS research for more than three decades.
During the last decade, miniaturized projection displays and various medical-imaging …

This review provides a summary of work on the resonant nonlinear dynamics of micro-and
nanoelectromechanical systems. This research area, which has been active for …

A novel microelectromechanical systems (MEMS) actuation technique is developed for
retinal scanning display and imaging applications allowing effective drive of a two-axes …

Bi-axial or two-dimensional (2D) MEMS micro-scanning mirrors (or micro-scanners) are
considered the key component for laser scanning projectors. Many studies have shown the …

A comb-actuated torsional microscanner is developed for high-resolution laser-scanning
display systems. Typical torsional comb-drive scanners have fingers placed around the …

This article demonstrates a vibration test for a resonant MEMS scanning system in operation
to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a …

This review provides a summary of the work completed to date on the nonlinear dynamics of
resonant micro-and nanoelectromechanical systems (MEMS/NEMS). This research area …

We previously designed a dual-axis piezoelectric MEMS mirror with a low crosstalk gimbal
structure, which is utilized as the key device for further research for laser beam scanning …

This article presents a novel method to derive and identify an accurate small perturbation
model of a comb-actuated resonant microelectromechanical system (MEMS) mirror with …

Given the fact that MEM gyroscopes can provide a better solution for inertial sensors in terms
of size and cost, increasing their performance will remain an important issue in the …