Review of several precision finishing processes for optics manufacturing

G Ghosh, A Sidpara… - Journal of …, 2018 - journals.sagepub.com
The ultrasmooth optical components with atomic-order surface roughness and nanometre-
level shape accuracy are in immense demand with the rapid advancement of modern optical …

Plasma polishing processes applied on optical materials: A review

HNS Yadav, M Kumar, A Kumar… - Journal of …, 2023 - journals.sagepub.com
Nowadays, the surface quality of the material is crucial for industry and science. With the
development of micro-electronics and optics, the demand for surface quality has become …

Study on the system matching of ultrasonic vibration assisted grinding for hard and brittle materials processing

Y Wang, B Lin, S Wang, X Cao - International Journal of Machine Tools and …, 2014 - Elsevier
Ultrasonic vibration assisted grinding (UAG) is an effective processing method for hard and
brittle materials. Compared with common grinding (CG), both of grinding force and …

A cutting force model for rotary ultrasonic machining of brittle materials

DF Liu, WL Cong, ZJ Pei, YJ Tang - International Journal of Machine Tools …, 2012 - Elsevier
Knowing cutting force in rotary ultrasonic machining (RUM) can help optimizing input
variables. RUM of brittle materials has been investigated both experimentally and …

An analytical model to predict the depth of sub-surface damage for grinding of brittle materials

J Yin, Q Bai, S Goel, P Zhou, B Zhang - CIRP Journal of Manufacturing …, 2021 - Elsevier
This paper proposes an analytical model for predicting grinding-induced sub-surface
damage depth in a silicon wafer. The model integrates the dislocation kinetics for crack …

Silicon wafer crack detection using nonlinear ultrasonic modulation induced by high repetition rate pulse laser

J Jang, P Liu, B Kim, S Kim, H Sohn - Optics and Lasers in Engineering, 2020 - Elsevier
In this study, a high repetition rate laser ultrasonic system is developed for noncontact
detection of silicon wafer crack. A high repetition rate pulse laser is used to generate two …

Amplitude effect on micro-hole drilling of 3D needled Cf/SiC by ultrasonic vibration

M Wang, H Yu, J Xu, G Chen, B Dai, S Wang - Ceramics International, 2021 - Elsevier
The poor quality of the micro-hole in the conventional drilling (CD) of 3D needled Cf/SiC
composites seriously limits its application in modern industry. Ultrasonic assisted drilling …

Precision grinding of engineering ceramic based on the electrolytic dressing of a multi-layer brazed diamond wheel

Q Wu, Z Ouyang, Y Wang, H Yang, K Song - Diamond and Related …, 2019 - Elsevier
A multi-layer brazed diamond wheel was produced by combing compression molding and
vacuum brazing technology. In addition, electrolytic dressing was used to overcome the …

A grinding force model considering the arc-track feeding unit device in ELID grinding of the non-standard ultra-precision bearings

C Ren, X Li, M Wu - Journal of Manufacturing Processes, 2023 - Elsevier
Bearings play an important role in the national defense industry. The demands for the ultra-
precision non-standard bearings are increasing year by year. Correspondingly, the …

Elimination of surface scratch/texture on the surface of single crystal Si substrate in chemo-mechanical grinding (CMG) process

YB Tian, L Zhou, J Shimizu, Y Tashiro, RK Kang - Applied Surface Science, 2009 - Elsevier
Si wafers are widely used as a substrate material for fabricating ICs. The quality of ICs
depends on the quality of Si wafers. The chemo-mechanical grinding (CMG) with soft …