Micro-electromechanical systems (MEMS) Coriolis vibratory ring gyroscope, which utilizes
Byran effect to detect rotation, is regarded as a two-dimensional derivative of vibrating shell …

We report on a new design approach for XY symmetric resonator, emphasizing the increase
in symmetry by localization of the device anchors. The resonator is mechanized as a z-axis …

A new micromachined vibrating ring gyroscope (VRG) architecture with low quadrature error
and high-linearity is proposed, which successfully optimizes the working modes to first order …

This paper analyzes the effect of the anisotropy of single crystal silicon on the frequency split
of the vibrating ring gyroscope, operated in the n= 2 wineglass mode. Firstly, the elastic …

Summary This chapter summarizes Micro‐Electromechanical Systems (MEMS) inertial
sensors and their application to navigation solutions, with the goal of providing a practical …

In this paper, we present two design methods to improve the performance of disk resonator
gyroscope (DRG), including decreasing the frequency split and increasing the quality factor …

We report on a new design approach for XY symmetric resonator, that can be mechanized
as rate (RG) or rate-integrating gyroscope (RIG), with a single digit as-fabricated frequency …

The acronym MEMS represents a broad group of siliconbased sensors made by
semiconductor wafer manufacturing processes. Using photolithographic patterning and …

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