C Wang, C Zeng, H Ning, F Li, M Liu, K Xu… - Journal of Alloys and …, 2023 - Elsevier
Pulsed laser deposition (PLD) and two-step thermal annealing are combined to fabricate
MgO, TiO 2, Y 2 O 3, Al 2 O 3, ZrO 2 and HfO 2 passivation layers on a-IGZO TFTs. The …