Cantilever-like micromechanical sensors

A Boisen, S Dohn, SS Keller, S Schmid… - Reports on Progress in …, 2011 - iopscience.iop.org
The field of cantilever-based sensing emerged in the mid-1990s and is today a well-known
technology for label-free sensing which holds promise as a technique for cheap, portable …

Microcantilever: Dynamical response for mass sensing and fluid characterization

J Mouro, R Pinto, P Paoletti, B Tiribilli - Sensors, 2020 - mdpi.com
A microcantilever is a suspended micro-scale beam structure supported at one end which
can bend and/or vibrate when subjected to a load. Microcantilevers are one of the most …

[图书][B] Handbook of nanophysics: functional nanomaterials

KD Sattler - 2010 - taylorfrancis.com
Handbook of Nanophysics: Functional Nanomaterials illustrates the importance of tailoring
nanomaterials to achieve desired functions in applications. Each peer-reviewed chapter …

Freestanding laser-induced graphene ultrasensitive resonative viral sensors

Y Ben-Shimon, CP Sharma, CJ Arnusch… - … applied materials & …, 2022 - ACS Publications
Early and reliable detection of an infectious viral disease is critical to accurately monitor
outbreaks and to provide individuals and health care professionals the opportunity to treat …

Monolithic CMOS MEMS oscillator circuit for sensing in the attogram range

J Verd, A Uranga, G Abadal, JL Teva… - IEEE electron device …, 2008 - ieeexplore.ieee.org
This letter presents the design, fabrication, and demonstration of a CMOS/
microelectromechanical system (MEMS) electrostatically self-excited resonator based on a …

Chemical sensors with integrated electronics

S Joo, RB Brown - Chemical reviews, 2008 - ACS Publications
Building on the invention of the transistor by Brattain and Bardeen, 1 an enormous amount
of research in semiconductors and integrated circuits (ICs) has established the modern …

Nonlinear dynamics of a resonant gas sensor

AH Nayfeh, HM Ouakad, F Najar, S Choura… - Nonlinear …, 2010 - Springer
We develop a mathematical model for a resonant gas sensor made up of an microplate
electrostatically actuated and attached to the end of a cantilever microbeam. The model …

Resonant gas sensor and switch operating in air with metal-organic frameworks coating

N Jaber, S Ilyas, O Shekhah… - Journal of …, 2018 - ieeexplore.ieee.org
We demonstrate a resonant gas sensor uniformly coated with a metal-organic framework
(MOF) and excited near the second vibration mode for enhanced sensitivity. The possibility …

A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

HS Wasisto, Q Zhang, S Merzsch, A Waag… - Microsystem …, 2014 - Springer
A closed-loop circuit is developed in this work for tracking the resonant frequency of silicon
microcantilever mass sensors. The proposed closed-loop system is mainly based on a …

Thin-film silicon MEMS for dynamic mass sensing in vacuum and air: Phase noise, allan deviation, mass sensitivity and limits of detection

RMR Pinto, P Brito, V Chu… - Journal of …, 2019 - ieeexplore.ieee.org
Microelectromechanical sensors have extreme mass sensitivities, making them promising
for mass sensing, gas sensing, and biosensing applications. Despite the numerous …