Advances in atomic layer deposition

J Zhang, Y Li, K Cao, R Chen - Nanomanufacturing and Metrology, 2022 - Springer
Atomic layer deposition (ALD) is a thin-film fabrication technique that has great potential in
nanofabrication. Based on its self-limiting surface reactions, ALD has excellent conformality …

Toward Advanced High‐k and Electrode Thin Films for DRAM Capacitors via Atomic Layer Deposition

SE Kim, JY Sung, JD Jeon, SY Jang… - Advanced Materials …, 2023 - Wiley Online Library
Dynamic random access memories (DRAMs) are currently used as the core memory in
computing systems because of their high speed and density. Their demand should continue …

[HTML][HTML] The search for the most conductive metal for narrow interconnect lines

D Gall - Journal of Applied Physics, 2020 - pubs.aip.org
A major challenge for the continued downscaling of integrated circuits is the resistivity
increase of Cu interconnect lines with decreasing dimensions. Alternative metals have the …

Vapor-deposited zeolitic imidazolate frameworks as gap-filling ultra-low-k dielectrics

M Krishtab, I Stassen, T Stassin, AJ Cruz… - Nature …, 2019 - nature.com
The performance of modern chips is strongly related to the multi-layer interconnect structure
that interfaces the semiconductor layer with the outside world. The resulting demand to …

Simple analytical method for determining electrical resistivity and sheet resistance using the van der Pauw procedure

FS Oliveira, RB Cipriano, FT Da Silva, EC Romão… - Scientific reports, 2020 - nature.com
This work reports an analytical method for determining electrical resistivity (ρ) and sheet
resistance (RS) of isotropic conductors. The method is compared with previous numerical …

Thin-film platinum resistance temperature detector with a SiCN/Yttria-stabilized zirconia protective layer by direct ink writing for high-temperature applications

Y Zeng, G Chen, C Wu, X Pan, F Lin, L Xu… - … Applied Materials & …, 2022 - ACS Publications
In situ temperature monitoring of curved high-temperature components in extreme
environments is challenging for a variety of applications in fields such as aero engines and …

Efficient plasmon-mediated energy funneling to the surface of Au@ Pt core–shell nanocrystals

C Engelbrekt, KT Crampton, DA Fishman, M Law… - ACS …, 2020 - ACS Publications
The structure and ultrafast photodynamics of∼ 8 nm Au@ Pt core–shell nanocrystals with
ultrathin (< 3 atomic layers) Pt–Au alloy shells are investigated to show that they meet the …

Properties of ultrathin molybdenum films for interconnect applications

V Founta, JP Soulié, K Sankaran, K Vanstreels… - Materialia, 2022 - Elsevier
The structural and electrical properties of Mo thin films with thicknesses between 3 and 50
nm, deposited by physical vapor deposition, have been evaluated in order to assess the …

Low‐conductance and multilevel CMOS‐integrated nanoscale oxide memristors

X Sheng, CE Graves, S Kumar, X Li… - Advanced electronic …, 2019 - Wiley Online Library
Using memristors, such as oxide and phase change resistive switches, as tunable resistors
to construct analog computing hardware accelerators is gaining keen attention. Such …

Field-free switching of perpendicular magnetization induced by longitudinal spin-orbit-torque gradient

X Shu, L Liu, J Zhou, W Lin, Q Xie, T Zhao, C Zhou… - Physical Review …, 2022 - APS
Spin-orbit-torque (SOT) symmetry in a heavy-metal–ferromagnet bilayer forbids the
deterministic switching of perpendicular magnetization. Traditionally, an external magnetic …