The Monte Carlo code SIMTRA, simulating the transport of atoms from the source to the
substrate during physical vapor deposition (PVD), is used in several case studies to …

The high power impulse magnetron sputtering (HiPIMS) discharge is a recent addition to
plasma based sputtering technology. In HiPIMS, high power is applied to the magnetron …

Tunability has added an important dimension to a variety of laser devices and led to new
systems and applications. From laser spectroscopy to Bose-Einstein condensation, the one …

Time-resolved tunable diode-laser absorption spectroscopy measurements were performed
on the argon metastable (Ar m) level 3s 2 3p 5$(^{2}{\rm P}^{\circ} _ {3/2}) $ 4s excited at …

Transient Al plasma produced by excimer laser ablation in vacuum was investigated through
laser absorption spectroscopy to probe the space-time evolution of neutral species …

A hybrid high-power impulse magnetron sputtering (HiPIMS)+ mid-frequency (MF)
magnetron sputtering system was used for the deposition of crystalline TiO 2 thin films at a …

Pulsed systems are extensively used to produce active species such as atoms, radicals,
excited states, etc. The tunable diode laser absorption spectroscopy (TD-LAS) is …

Time-resolved investigations of excited argon atom density and temperature and ground-
state titanium atom density during high-power impulse magnetron sputtering (HiPIMS …

Spatial density and temperature profiles of neon metastables produced in a radio frequency
(rf) discharge were investigated by means of tunable diode laser absorption spectroscopy …

The tunable diode laser absorption spectroscopy method was used to measure Ar
metastable density in order to study the dust growth process in hydrocarbon-containing …