CMOS compatible MEMS multienvironmental sensor chip for human thermal comfort measurement in smart buildings

W Xu, H Tavakkoli, X Zhao, YK Lee - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
In this article, CMOS compatible microelectromechanical systems (MEMS)
multienvironmental sensor chip (MESC) is reported. The chip is comprised of temperature …

CMOS compatible MEMS air velocity sensor with improved sensitivity and linearity for human thermal comfort sensing applications

W Xu, LJ Yang, YK Lee - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
In this paper, we report an optimized CMOS compatible MEMS thermoresistive calorimetric
air velocity (TMCV) sensor to measure small air velocity in an indoor environment for the …

Experimental study of parylene based capacitive humidity sensor for integrated thermal comfort sensing application

H Tavakkoli, Z Xu, W Xu, H Luo, YK Lee - IEEE Sensors Letters, 2021 - ieeexplore.ieee.org
In this letter, we report the temperature effect and noise characterization of the Parylene-
based capacitive humidity sensor which can be used for integrated CMOS compatible …

Miniaturized and Highly Integrated Humidity Sensor with Biocompatible Sensing Material for Smart Farming

M Schlagmann, F Selbmann, M Haubold… - 2022 Smart Systems …, 2022 - ieeexplore.ieee.org
Agriculture provides the base of our society. To enable sustainable processes, integrated
pest management is an integral part in the future of agriculture. Novel biocompatible and …

Single-chip integration of cmos compatible mems temperature/humidity and highly sensitive flow sensors for human thermal comfort sensing application

W Xu, H Tavakkoli, J Cabot, X Zhao… - … Conference on Solid …, 2021 - ieeexplore.ieee.org
In this work, we report a single-chip integration of CMOS compatible MEMS temperature,
humidity, and highly sensitive flow sensor for the application of human thermal comfort …

Graphene, GO, and Borophene: Innovations in QCM-Based Humidity Sensors for Enhanced Sensitivity

Z Demirtaş, M Kirazoğlu, B Benli - Open Journal of Nano, 2024 - dergipark.org.tr
Humidity measurements are crucial in daily life as they influence human comfort, health,
safety, and product quality. Quartz Crystal Microbalance (QCM) sensors, known for their fast …

[图书][B] Micro Thermal Comfort Sensing System for Indoor HVAC Applications

I Izhar - 2021 - search.proquest.com
Thermal comfort measurement in an indoor environment is essential as it impactspeople's
health and productivity. Several indices, such as effective temperature, heat stressindex …