Microfluidics is an emerging field that has given rise to a large number of scientific and
technological developments over the last few years. This review reports on the use of …

Since its introduction in the nineties, the negative resist SU‐8 has been increasingly used in
micro‐and nanotechnologies. SU‐8 has made the fabrication of high‐aspect ratio structures …

The fabrication of three-dimensional (3D) microfluidic networks entirely made of SU-8 with
integrated electrodes is reported. The described technology allows the fabrication of …

The design, modeling, and simulation of a novel micromachined magnetic field sensor are
discussed. The sensor uses an electrostatic resonator whose fundamental resonant …

This paper presents a novel type of resonant magnetic field sensor exploiting the Lorentz
force and providing a frequency output. The mechanical resonator, a cantilever structure, is …

In-plane rotary comb-drives suspended by serpentine flexures were demonstrated to
achieve larger rotation angles than those suspended by clamped straight beams. The …

We present a process for fabrication of free-standing SU-8 probes, with a dry, mechanical
release of the final micro-devices. The process utilizes the thermal release tape, a commonly …

In this paper, a highly integrable pressurized thermo-pneumatic microvalve for impulsion
and handling of fluids in portable SU-8 microfluidic platforms is reported. The microvalve …

This paper reports on a highly sensitive resonant magnetic microsensor with a shift of the
mechanical resonance frequency f res depending quadratically on the magnetic flux density …

Magnetic sensors with high sensitivity are critical for various technological applications. This
paper presents a highly sensitive magnetic sensor based on magnetic torque. The sensor …