This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

In this paper, we summarize research activities and technological progress in the field of
current CMOS-MEMS resonators and oscillators for portable sensor node and timing …

A fully monolithic complimentary metal-oxide-semiconductor-microelectormechanical
systems (CMOS-MEMS) oscillator comprised of an ovenized double-ended tuning fork …

Fundamental science, as well as all communications and navigation systems, are heavily
reliant on the phase, timing, and synchronization provided by low‐noise and agile frequency …

This paper reports on the design and characterization of a high-gain tunable
transimpedance amplifier (TIA) suitable for gigahertz oscillators that use high-Q lateral …

This paper presents optimization of interdigitated (d 33) piezoelectric MEMS unimorph
cantilever beams for harvesting vibration energy or for tuning resonators. The analysis of the …

This paper presents a wine-glass bulk mode disk resonator based on a novel transverse
piezoelectric actuation technique to achieve bulk mode resonance of the single crystalline …

This paper reports on the demonstration of series tuning for lateral micromechanical
oscillators and its application for electronic temperature compensation of piezoelectric …

The term radio frequency (RF) microelectromechanical systems (MEMS) refers to electronic
devices with a moving submillimeter-sized part (beam, comb, disc, or ring), which provide …

A low-temperature (<; 300° C) low-stress microelectromechanical systems fabrication
process based on a silicon carbide structural layer is presented. A partially conductive …