Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

The movement or migration of charges in dielectric materials like silicon oxide, silicon nitride
and glass, is recognized as one of the most significant causes of drift instability of MEMS …

In this paper, we investigate the impact of environment gases and relative humidity on
dielectric charging phenomenon in electrostatically actuated micro-and nano …

This article presents the design, realization and measurement of thin-film packaged RF-
MEMS switched capacitors for millimeter-wave applications. Packaging is included in the …

A study of field emission process in MEMS-based capacitor/switch-like geometries is
presented. High resolution current–voltage characteristics up to breakdown have been …

An improved method to study the long term discharge current through the dielectric film in
microelectromechanical system capacitive switches is presented. The method allows the …

In this work, for the first time different stiction mechanisms in electrostatic micro-
electromechanical systems (MEMS) switches were studied. In these devices stiction can be …

This work presents a novel characterization methodology for the dielectric charging
phenomenon in electrostatically driven MEMS devices using Kelvin probe force microscopy …

The paper investigates the charging mechanisms of plasma enhanced chemical vapor
deposition (PECVD) silicon nitride films, which are used in MEMS capacitive switches. The …

In this study, two different characterization techniques based on Kelvin probe force
microscopy (KPFM) have been used to investigate the dielectric and substrate charging in …