Growth and applications of group III-nitrides

O Ambacher - Journal of physics D: Applied physics, 1998 - iopscience.iop.org
Recent research results pertaining to InN, GaN and AlN are reviewed, focusing on the
different growth techniques of Group III-nitride crystals and epitaxial films, heterostructures …

Recent progress in selective area growth and epitaxial lateral overgrowth of III‐nitrides: effects of reactor pressure in MOVPE growth

K Hiramatsu, K Nishiyama, A Motogaito… - … status solidi (a), 1999 - Wiley Online Library
Abstract Effects of reactor pressure on the epitaxial lateral overgrowth (ELO) via low
pressure MOVPE have been studied in relation to the growth temperature. For the ELO GaN …

Process for selective masking of III-N layers and for the preparation of free-standing III-N layers or of devices, and products obtained thereby

F Habel, F Scholz, B Neubert, P Brückner… - US Patent …, 2010 - Google Patents
The invention relates to a process for the selective covering of predetermined crystal facets
(crystal planes) during the growth, and in particular the epitaxial growth of group III nitrides …

Fabrication and characterization of low defect density GaN using facet-controlled epitaxial lateral overgrowth (FACELO)

K Hiramatsu, K Nishiyama, M Onishi, H Mizutani… - Journal of Crystal …, 2000 - Elsevier
Facet structures of GaN grown by epitaxial lateral overgrowth (ELO) via low-pressure
metalorganic vapor-phase epitaxy (LP-MOVPE) are controlled by growth conditions such as …

Growth of Fe doped semi-insulating GaN by metalorganic chemical vapor deposition

S Heikman, S Keller, SP DenBaars… - Applied Physics …, 2002 - pubs.aip.org
Iron doped GaN layers were grown by metalorganic chemical vapor deposition (MOCVD)
using ferrocene as the Fe precursor. Specular films with concentrations up to 1.7× 10 19 …

Metal organic vapour phase epitaxy of GaN and lateral overgrowth

P Gibart - Reports on Progress in Physics, 2004 - iopscience.iop.org
Gallium nitride (GaN) is an extremely promising wide band gap semiconductor material for
optoelectronics and high temperature, high power electronics. Actually, GaN is probably the …

Epitaxial lateral overgrowth of GaN

B Beaumont, P Vennéguès, P Gibart - physica status solidi (b), 2001 - Wiley Online Library
Since there is no GaN bulk single crystal available, the whole technological development of
GaN based devices relies on heteroepitaxy. Numerous defects are generated in the …

Inversion of wurtzite GaN (0001) by exposure to magnesium

V Ramachandran, RM Feenstra, WL Sarney… - Applied Physics …, 1999 - pubs.aip.org
Magnesium incorporation during the molecular-beam epitaxy growth of wurtzite GaN is
found to invert the Ga-polar (0001) face to the N-polar face. The polarity is identified based …

Nucleation and growth of GaN nanorods on Si (111) surfaces by plasma-assisted molecular beam epitaxy-The influence of Si-and Mg-doping

F Furtmayr, M Vielemeyer, M Stutzmann… - Journal of Applied …, 2008 - pubs.aip.org
The self-assembled growth of GaN nanorods on Si (111) substrates by plasma-assisted
molecular beam epitaxy under nitrogen-rich conditions is investigated. An amorphous …

Epitaxial lateral overgrowth techniques used in group III nitride epitaxy

K Hiramatsu - Journal of Physics: Condensed Matter, 2001 - iopscience.iop.org
Selective-area growth (SAG) and epitaxial lateral overgrowth (ELO) techniques used in
group III nitride epitaxy are reviewed. Structurally controlled GaN in line patterns and dot …