MEMS sensors have the advantages of small volume, lightweight, and low cost, therefore,
have been widely used in the fields of consumer electronics, industry, health, defence, and …

Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …

Laser interferometry is one of the most accurate measurement technologies whose
displacement resolution can reach the femtometer (fm) level. With the development of Micro …

High precision accelerometers play a vital role in the measurement of the Earth's
gravitational field. They can be used in the rotating-accelerometer-based gravity gradient …

This paper reports a novel MEMS accelerometer whose effective stiffness can be adjusted
flexibly and even tuned to almost zero by using the electrostatic softening effect of two …

High-sensitivity accelerometry has historically been employed to explore Earth sciences and
advance resource-related industries, such as petroleum exploitation. The devices capable of …

In this paper, a novel MEMS accelerometer with tuned quasi-zero stiffness stabilized and
operated in a closed-loop is proposed. By using the electrostatic softening effect of the …

Flexoelectricity is a strain-gradient-induced electromechanical coupling effect promising for
high-resolution sensing. A novel displacement sensing method is developed based on long …

The reduction of temperature effect is vitally important for high precision sensors. This paper
introduces the theoretical analysis and experimental verification of an in-situ compensation …

Pre-shaped microbeams, curved or inclined, are widely used in MEMS for their interesting
stiffness properties. These mechanisms allow a wide range of positive and negative stiffness …