Lab-on-chip technologies: making a microfluidic network and coupling it into a complete microsystem—a review
Microfluidics is an emerging field that has given rise to a large number of scientific and
technological developments over the last few years. This review reports on the use of …
technological developments over the last few years. This review reports on the use of …
Glass based micro total analysis systems: Materials, fabrication methods, and applications
Microfluidics has become recognized as a powerful platform technology with a wide range of
applications in various fields, such as biology, biomedicine, chemistry and environment. To …
applications in various fields, such as biology, biomedicine, chemistry and environment. To …
Micro-hole drilling on glass substrates—A review
LA Hof, J Abou Ziki - Micromachines, 2017 - mdpi.com
Glass micromachining is currently becoming essential for the fabrication of micro-devices,
including micro-optical-electro-mechanical-systems (MOEMS), miniaturized total analysis …
including micro-optical-electro-mechanical-systems (MOEMS), miniaturized total analysis …
Deep dry etching of borosilicate glass using SF6 and SF6/Ar inductively coupled plasmas
Deep reactive ion etching (DRIE) of borosilicate glass was carried out using SF6 and SF6/Ar
plasmas in an inductively coupled plasma (ICP) reactor. Electroplated Ni on Cu (≅ 50nm)/Cr …
plasmas in an inductively coupled plasma (ICP) reactor. Electroplated Ni on Cu (≅ 50nm)/Cr …
Nanoscience with non-equilibrium plasmas at atmospheric pressure
T Belmonte, G Arnoult, G Henrion… - Journal of Physics D …, 2011 - iopscience.iop.org
This review devoted to nanoscience with atmospheric-pressure plasmas shows how
nanomaterials are synthesized locally using three main ways: localized plasma-enhanced …
nanomaterials are synthesized locally using three main ways: localized plasma-enhanced …
Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding
Two dry subtractive techniques for the fabrication of microchannels in borosilicate glass
were investigated, plasma etching and laser ablation. Inductively coupled plasma reactive …
were investigated, plasma etching and laser ablation. Inductively coupled plasma reactive …
Retracted article: Utility of plasma: A new road from physics to chemistry
In recent years, plasma has proved to have great promise in the fields of chemistry, biology,
physics, biotechnological and medical sciences. In this review, we discuss plasma versatility …
physics, biotechnological and medical sciences. In this review, we discuss plasma versatility …
Deep plasma etching of glass for fluidic devices with different mask materials
K Kolari, V Saarela, S Franssila - Journal of Micromechanics and …, 2008 - iopscience.iop.org
Deep reactive ion etching (DRIE) processes have been developed for fabricating fluidic
devices in glass (Pyrex™ and fused silica) substrates with cavities deeper than 100 µm. By …
devices in glass (Pyrex™ and fused silica) substrates with cavities deeper than 100 µm. By …
A novel concept of the integrated fluorescence detection system and its application in a lab-on-a-chip microdevice
R Mazurczyk, J Vieillard, A Bouchard, B Hannes… - Sensors and Actuators B …, 2006 - Elsevier
In the paper, an innovative concept of fabrication of lab-on-a-chip (LOC) analytical
microsystems, is presented. One of the major trends in design and fabrication of the LOC …
microsystems, is presented. One of the major trends in design and fabrication of the LOC …
CO2 laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving
In this study, we investigate the effects of CO 2 laser polishing on microscopic structures
fabricated by femtosecond laser assisted carving (FLAC). FLAC is the peripheral laser …
fabricated by femtosecond laser assisted carving (FLAC). FLAC is the peripheral laser …