Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies

O Auciello, DM Aslam - Journal of Materials Science, 2021 - Springer
A comprehensive review is presented on the advances achieved in past years on
fundamental and applied materials science of diamond films and engineering to integrate …

[HTML][HTML] Piezoresistive carbon-containing ceramic nanocomposites–a review

E Ricohermoso III, F Rosenburg, F Klug, N Nicoloso… - Open Ceramics, 2021 - Elsevier
The present review introduces a class of ceramic nanocomposites that contain carbon as
disperse phases and exhibit piezoresistive behavior. After a brief introduction in which the …

Self-transducing silicon nanowire electromechanical systems at room temperature

R He, XL Feng, ML Roukes, P Yang - Nano letters, 2008 - ACS Publications
Electronic readout of the motions of genuinely nanoscale mechanical devices at room
temperature imposes an important challenge for the integration and application of …

A silicon carbonitride ceramic with anomalously high piezoresistivity

L Zhang, Y Wang, Y Wei, W Xu, D Fang… - Journal of the …, 2008 - Wiley Online Library
The piezoresistive behavior of a silicon carbonitride ceramic derived from a polymer
precursor is investigated under a uniaxial compressive loading condition. The electric …

Silicon compatible materials for harsh environment sensors

GH Kroetz, MH Eickhoff, H Moeller - Sensors and Actuators A: Physical, 1999 - Elsevier
The wide bandgap semiconductors silicon carbide and diamond and the material system
Silicon On Insulator (SOI) are compared regarding their suitability as silicon compatible …

Carbon-based materials: growth, properties, MEMS/NEMS technologies, and MEM/NEM switches

M Liao, Y Koide - Critical Reviews in Solid State and Materials …, 2011 - Taylor & Francis
Micro-or nanoelectromechanical system (MEMS/NEMS) is a multidisciplinary field, which
has witnessed explosive growth during the past decades. The current materials for MEMS …

A critical review of chemical vapor-deposited (CVD) diamond for electronic applications

TA Railkar, WP Kang, H Windischmann… - Critical reviews in …, 2000 - Taylor & Francis
A Critical Review of Chemical Vapor-Deposited (CVD) Diamond for Electronic Applications
Page 1 Critical Reviews in Solid State and Materials Sciences, 25(3):163-277 (2000) A Critical …

Giant piezoresistivity in polymer-derived amorphous SiAlCO ceramics

Y Cao, X Yang, R Zhao, Y Chen, N Li, L An - Journal of materials science, 2016 - Springer
The piezoresistive behavior of polymer-derived amorphous SiAlCO ceramic is studied in a
temperature range of 25–300° C. It is shown that the material exhibits a giant gage factor of …

Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

MA Fraga, H Furlan, RS Pessoa, LA Rasia… - Microsystem …, 2012 - Springer
The use of thin films as sensing elements for microsensor applications has been shown very
attractive due to their low-cost fabrication, potential for integration with standard CMOS …

Ultra-high sensitivity intra-grain poly-diamond piezoresistors

S Sahli, DM Aslam - Sensors and Actuators A: Physical, 1998 - Elsevier
Chemical vapor deposited (CVD) polycrystalline diamond is inexpensive and can become a
commercially viable piezoresistive sensor material if its typical gauge factor (GF) exceeds …