This article provides an overview of the operational strategies adopted in microgrippers
design. The review covers microgrippers recently proposed in Literature, some of which …

Electrothermal micromirrors have become an important type of micromirrors due to their
large angular scanning range and large linear motion. Typically, electrothermal micromirrors …

This paper describes electrothermal microactuators that generate rectilinear displacements
and forces by leveraging deformations caused by localized thermal stresses. In one …

It is challenging at best to find a resource that provides the breadth of information necessary
to develop a successful micro electro mechanical system (MEMS) design. Micro Electro …

This paper gives a brief overview of microactuators, focussing on devices made by
microfabrication technologies which are based on silicon processes like photolithography …

This paper presents a new type of MEMS (micro-electromechanical systems) actuator
consisting of an array of in-plane micro-fabricated thermal buckle-beam actuators. The …

A comprehensive thermal model for an electro-thermal-compliant (ETC) microactuator is
presented in this paper. The model accounts for all modes of heat dissipation and the …

This work addresses a range of issues on modeling electrothermal microactuators, including
the physics of temperature dependent material properties and Finite Element Analysis (FEA) …

Electro-thermal-compliant (ETC) microdevices provide arbitrary in-plane displacements
through non-uniform Joule heating by virtue of their specially designed topology and shape …

We report on a modified transfer technique for atomically thin materials integrated into
microelectromechanical systems (MEMS) for studying strain physics and creating strain …