Fabrication of ultra-high-Q Ta2O5 microdisks by photolithography-assisted chemo-mechanical etching

M Li, G Zhao, J Lin, R Gao, J Guan, CH Li, Q Qiao… - Optics …, 2024 - opg.optica.org
Tantalum pentoxide (Ta_2O_5) is widely recognized as a promising material platform for
photonic integration. This is primarily attributed to its exceptional properties including large …

Tantalum pentoxide on a fused quartz substrate platform for advanced photonic integrated circuits

G Sim, SW Jeon, DD Kang, YS Lee, Y Kim… - Optical Materials …, 2024 - opg.optica.org
Integrated photonics is a growing field in optics and microelectronics. In particular, tantalum
pentoxide (Ta_2O_5) is a promising material for advancing integrated photonic circuits …

[HTML][HTML] High-Extraction-Rate Ta2O5-Core/SiO2-Clad Photonic Waveguides on Silicon Fabricated by Photolithography-Assisted Chemo-Mechanical Etching (PLACE)

J Liu, Y Liang, L Gao, C Sun, J Guan, Z Wang… - …, 2024 - pmc.ncbi.nlm.nih.gov
We demonstrate high-extraction-rate Ta2O5-core/SiO2-clad photonic waveguides on silicon
fabricated by the photolithography-assisted chemo-mechanical etching technique. Low …

Accelerating finite-difference frequency-domain simulations of inverse designed structures in nanophotonics using deep learning

LAK Schulte, M Butz, M Becker, B Risse, C Schuck - JOSA B, 2024 - opg.optica.org
The inverse design of nanophotonic devices is becoming increasingly relevant for the
development of complex photonic integrated circuits. Electromagnetic first-order simulations …

Low-loss and Thermorefractive-stable Tantalum Pentoxide Integrated Photonics

Z Liu, X Yu, Q Zhao - 2024 9th Optoelectronics Global …, 2024 - ieeexplore.ieee.org
Photonic integrated external laser cavities have the potential to significantly enhance laser
frequency stabilization and narrow linewidth applications. One of the foremost challenges in …