Photonics integrated piezomems-pipmems: A scalable hybrid platform for next-generation MEMS

Aluminum nitride thin film based reconfigurable integrated photonic devices

Z Luo, A Zhang, W Huang, S Shao… - IEEE Journal of …, 2023 - ieeexplore.ieee.org
In the past few decades, silicon photonics with complementary metal-oxide-semiconductor
(CMOS) process compatibility has been well developed and successfully applied to …
被引用次数：10 相关文章

Low cost, contamination-free, and damage-free fabrication of PZT MEMS on SOI substrate

S Tiwari, R Kumar, A Dangi, JA Antony… - Journal of …, 2021 - iopscience.iop.org
This paper reports a generalised process flow for the fabrication of lead zirconate titanate
based piezoelectric micro electromechanical system devices. The optimised process can be …
被引用次数：4 相关文章 所有 2 个版本

Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning

P Venkatachalam, D Yumnam, S Gali… - … on Integrated Optics, 2024 - Springer
Photonic Integrated Piezo-MEMS (Pip-MEMS) Device for 1D Beam Scanning | SpringerLink
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