A micro-mirror that comprises a substrate, a hinge structure formed on the substrate and a
mirror plate attached to the hinge structure is provided for use in display systems. The mirror …

Embodiments of the present invention generally relate to a device that has an improved
usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction …

Embodiments of the present invention generally relate to a device that has an improved
usable lifetime due to the pres ence of a lubricant that reduces the likelihood of stiction …

Embodiments of the present invention generally relate to a device that has an improved
usable lifetime due to the presence of a lubricant that reduces the likelihood of stiction …

An optical electronic device and method that forms cavities through an interposer wafer after
bonding the interposer wafer to a window wafer. The cavities are etched into the bonded …

One embodiment of an micromechanical device includes a? rst contact surface, a moveable
component having a second contact surface, and a coating of liquid or solid lubricant on at …

US7372615B2 - Method of operating a micromechanical device that contains anti-stiction
gas-phase lubricant - Google Patents US7372615B2 - Method of operating a …

Embodiments of the present invention generally relate to a process of forming a device that
has an improved usable lifetime due to the addition of a gas-phase lubricant that reduces …

A spatial light modulator for use in display applications. The spatial light modulator includes
a support substrate and a flexible member coupled to the support substrate. The spatial light …

One embodiment of an micromechanical device includes a first contact surface, a moveable
component having a second contact surface, where the second contact surface interacts …