Direct imaging of boron segregation to extended defects in silicon

S Duguay, T Philippe, F Cristiano, D Blavette - Applied Physics Letters, 2010 - pubs.aip.org
Silicon was implanted with a high boron dose (5× 10 15 at. cm− 2) at 30 keV and further
annealed at 950 C for 30 s. The sample was analyzed using transmission electron …

Fission time evolution with excitation energy from a crystal blocking experiment

F Goldenbaum, M Morjean, J Galin, E Lienard, B Lott… - Physical review …, 1999 - APS
Fission times of uraniumlike nuclei with excitation energies up to about 250 MeV have been
inferred from blocking effects in a single crystal. They are found longer by at least 1 order of …

Boron uphill diffusion during ultrashallow junction formation

R Duffy, VC Venezia, A Heringa, TWT Hüsken… - Applied Physics …, 2003 - pubs.aip.org
The recently observed phenomenon of boron uphill diffusion during low-temperature
annealing of ultrashallow ion-implanted junctions in silicon has been investigated. It is …

Transient enhanced diffusion in preamorphized silicon: the role of the surface

NEB Cowern, D Alquier, M Omri, A Claverie… - Nuclear Instruments and …, 1999 - Elsevier
Experiments on the depth dependence of transient enhanced diffusion (TED) of boron
during rapid thermal annealing of Ge-preamorphized layers reveal a linear decrease in the …

Engineering of boron-induced dislocation loops for efficient room-temperature silicon light-emitting diodes

M Milosavljević, G Shao, MA Lourenco… - Journal of Applied …, 2005 - pubs.aip.org
We have studied the role of boron ion energy in the engineering of dislocation loops for
silicon light-emitting diodes (LEDs). Boron ions from 10 to 80 keV were implanted in (100) Si …

Boron segregation to extended defects induced by self-ion implantation into silicon

J Xia, T Saito, R Kim, T Aoki, Y Kamakura… - Journal of applied …, 1999 - pubs.aip.org
The evolution of boron segregation to extended defects during thermal annealing was
studied with secondary ion mass spectrometry and cross-sectional transmission electron …

Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

BJ Pawlak, R Lindsay, R Surdeanu, B Dieu… - Journal of Vacuum …, 2004 - pubs.aip.org
Solid phase epitaxial regrowth (SPER) is a promising method for junction formation of sub-
65 nm complementary metal–oxide–semiconductor technology nodes. This is mainly due to …

Below-band-gap electroluminescence related to doping spikes in boron-implanted silicon diodes

JM Sun, T Dekorsy, W Skorupa, B Schmidt… - Physical Review B …, 2004 - APS
The origin of two luminescence bands with maxima around 1.05 eV and 0.95 eV is studied
in silicon pn diodes prepared by boron implantation. The two peaks are related to the …

Uphill diffusion of ultralow-energy boron implants in preamorphized silicon and silicon-on-insulator

M Ferri, S Solmi, D Giubertoni, M Bersani… - Journal of Applied …, 2007 - pubs.aip.org
Redistribution during annealing of low-energy boron (B) implants in silicon on insulator
(SOI) structures and in bulk Si has been investigated by comparing secondary ion mass …

Modélisation de la diffusion des dopants dans le silicium pour la réalisation de jonctions fines

F Boucard - 2003 - theses.hal.science
Les systèmes avancés d'assistance à la conduite automobile ont comme objectif d'apporter
de l'intelligence au véhicule en l'équipant d'un ensemble de capteurs extéroceptifs et …