Periodic nanostructure fabrication on the semiconductor monocrystalline surface
VV Valyavko, VP Osipov… - Lithography for …, 2001 - spiedigitallibrary.org
In this work it is shown the possibility of the nano-size periodic structures forming on the
surface of semiconductor monocrystals with low reflectivity by means of the intracavity laser …
surface of semiconductor monocrystals with low reflectivity by means of the intracavity laser …