Substrates and heat spreaders for heat management and RF isolation in integrated semiconductor devices having phase-change material (PCM) radio frequency (RF) …

DJ Howard, N El-Hinnawy, GP Slovin… - US Patent …, 2020 - Google Patents
(57) ABSTRACT A semiconductor device includes a substrate, an integrated passive device
(IPD), and a phase-change material (PCM) radio frequency (RF) switch. The PCM RF switch …

High reliability RF switch based on phase-change material

GP Slovin, DJ Howard, JE Rose, MJ Debar… - US Patent …, 2019 - Google Patents
A radio frequency (RF) switch includes a heating element, a nugget, a phase-change
material (PCM), and input/output contacts. The nugget comprises thermally conductive and …

Array architecture for large scale integration of phase-change material (PCM) radio frequency (RF) switches

GP Slovin, N El-Hinnawy, DJ Howard - US Patent 10,593,404, 2020 - Google Patents
An array includes a shared pulse generator and a plurality of cells. A selected cell the
plurality of cells includes a phasechange material (PCM) and a heating element, the heating …

Semiconductor devices having phase-change material (PCM) radio frequency (RF) switches and integrated passive devices

N El-Hinnawy, GP Slovin, JE Rose… - US Patent …, 2020 - Google Patents
A semiconductor device includes a substrate and a phase-change material (PCM) radio
frequency (RF) switch, having a heating element, a PCM situated over the heating element …

Heating element designs for phase-change material (PCM) radio frequency (RF) switches

N El-Hinnawy, GP Slovin, MJ Debar, JE Rose… - US Patent …, 2020 - Google Patents
(57) ABSTRACT A radio frequency (RF) switch includes a heating element, a phase-change
material (PCM) situated over the heating element, and PCM contacts situated over passive …

Wafer-to-wafer and die-to-wafer bonding of phase-change material (PCM) switches with integrated circuits and bonded two-die devices

GP Slovin, DJ Howard - US Patent 10,566,321, 2020 - Google Patents
In a method for wafer-to-wafer bonding, an integrated circuit (IC) wafer and a phase-change
material (PCM) switch wafer are provided. The IC includes at least one active device, and …

Device including PCM RF switch integrated with group III-V semiconductors

N El-Hinnawy, DJ Howard, GP Slovin… - US Patent …, 2021 - Google Patents
US10916540B2 - Device including PCM RF switch integrated with group III-V semiconductors
- Google Patents US10916540B2 - Device including PCM RF switch integrated with group …

PCM RF switch fabrication with subtractively formed heater

GP Slovin, JE Rose, DJ Howard, MJ Debar… - US Patent …, 2019 - Google Patents
In fabricating a radio frequency (RF) switch, a heat spreader is provided and a heating
element is deposited. A thermally conductive and electrically insulating material is deposited …

Phase-change material (PCM) radio frequency (RF) switches with stressor layers and contact adhesion layers

DJ Howard, JE Rose, GP Slovin… - US Patent …, 2019 - Google Patents
A radio frequency (RF) switch includes a stressed phase-change material (PCM) and a
heating element underlying an active segment of the stressed PCM and extending outward …

Transflective, PCM-based display device

H Bhaskaran, P Hosseini, B Broughton - US Patent 11,740,493, 2023 - Google Patents
The invention is notably directed to a transflective display device. The device comprises a
set of pixels, wherein each of the pixels comprises a portion of bi-stable, phase change …