Sequential nano-explosion using patterned porous silicon

S Keshavarzi, F Lima, W Kronast… - Journal of …, 2018 - ieeexplore.ieee.org
This paper reports a novel method to study and control explosions of explosive porous
silicon (porous silicon impregnated with an oxidizer). This is achieved by transferring an …

Process of forming a curved profile on a semiconductor substrate

Y Honda, T Nishikawa - US Patent 7,749,868, 2010 - Google Patents
A semiconductor substrate shaped to have a curved surface profile by anodization. Prior to
being anodized, the substrate is finished with an anode pattern on its bottom surface so as to …

Silicon Anodization as a Structuring Technique

A Ivanov - 2018 - Springer
In the last decades, miniaturization of sensors and actuators opened new possibilities for
applications of these devices in all fields of our lives. In order to fabricate such devices …

Controlled energy release based on explosive porous silicon

S Keshavarzi, W Kronast, F Lima… - 2017 IEEE 30th …, 2017 - ieeexplore.ieee.org
This paper reports on a novel method for controlled release of huge amount of energy stored
in a functionalized porous silicon (PS) on a silicon chip. This is achieved by adjusting the …

Miniaturized porous silicon rugate filter wheel for multispectral imaging applications

S Keshavarzi, A Kovacs, M Abdo… - MikroSystemTechnik …, 2019 - ieeexplore.ieee.org
Porous silicon has attracted the attention of material research during the past two decades
due to its efficient visible luminesce and fascinating passive optical properties. By controlling …

Process of making an optical lens

Y Honda, T Nishikawa - US Patent 8,313,632, 2012 - Google Patents
A semiconductor substrate is anodized to be shaped into an optical lens. Prior to being
anodized, the substrate is finished with an anode pattern on its bottom surface so as to be …