Y Honda, T Nishikawa - US Patent 7,749,868, 2010 - Google Patents
A semiconductor substrate shaped to have a curved surface profile by anodization. Prior to being anodized, the substrate is finished with an anode pattern on its bottom surface so as to …
In the last decades, miniaturization of sensors and actuators opened new possibilities for applications of these devices in all fields of our lives. In order to fabricate such devices …
S Keshavarzi, W Kronast, F Lima… - 2017 IEEE 30th …, 2017 - ieeexplore.ieee.org
This paper reports on a novel method for controlled release of huge amount of energy stored in a functionalized porous silicon (PS) on a silicon chip. This is achieved by adjusting the …
S Keshavarzi, A Kovacs, M Abdo… - MikroSystemTechnik …, 2019 - ieeexplore.ieee.org
Porous silicon has attracted the attention of material research during the past two decades due to its efficient visible luminesce and fascinating passive optical properties. By controlling …
Y Honda, T Nishikawa - US Patent 8,313,632, 2012 - Google Patents
A semiconductor substrate is anodized to be shaped into an optical lens. Prior to being anodized, the substrate is finished with an anode pattern on its bottom surface so as to be …