Role of cyclopentadienyl ligands of group 4 precursors toward high-temperature atomic layer deposition
TT Ngoc Van, D Jang, E Jung, H Noh… - The Journal of …, 2022 - ACS Publications
Deposition of high-k dielectric thin films is essential for manufacturing modern electronic
devices. Atomic layer deposition (ALD) is an attractive technology for depositing high-k …
devices. Atomic layer deposition (ALD) is an attractive technology for depositing high-k …
Water-rich conditions during titania atomic layer deposition in the 100° C-300° C temperature window produce films with TiIV oxidation state but large H and O content …
B Xia, JJ Ganem, I Vickridge, E Briand, S Steydli… - Applied Surface …, 2022 - Elsevier
Titania films prepared by atomic layer deposition attract great attention due to the
widespread application of the oxide as a photocatalytic material, or more recently, as a …
widespread application of the oxide as a photocatalytic material, or more recently, as a …
Kinetic Study of Tetrakis (Dimethylamido) Titanium and Titanium Tetrachloride Adsorption on a Silicon Surface in Atomic Layer Deposition: A DFT Calculation
T Promjun, T Rattana… - Integrated …, 2022 - Taylor & Francis
The adsorption characteristics were studied at room temperature (RT) of tetrakis
(dimethylamido) titanium (TDMAT) and titanium chloride (TiCl4) on the Si (100)-2× 1 surface …
(dimethylamido) titanium (TDMAT) and titanium chloride (TiCl4) on the Si (100)-2× 1 surface …
Investigation of agostic interaction through NBO analysis and its impact on β-hydride elimination and dehydrogenation: a DFT approach
Agostic interactions have been investigated through NBO analysis tuning each part of H 2
LM MZCHR 2 by varying metal centre and intramolecular groups in different positions of the …
LM MZCHR 2 by varying metal centre and intramolecular groups in different positions of the …
[HTML][HTML] Experimental and theoretical gas phase electronic structure study of tetrakis (dimethylamino) complexes of Ti (IV) and Hf (IV)
P Shayesteh, R Tsyshevsky, S Urpelainen… - Journal of Electron …, 2019 - Elsevier
The gas phase electronic structure of two transition metal alkylamino complexes, M (N (CH
3) 2) 4, where M= Ti, Hf, was studied using photoelectron spectroscopy and density …
3) 2) 4, where M= Ti, Hf, was studied using photoelectron spectroscopy and density …
[HTML][HTML] Plasmonic nanocomposites of zinc oxide and titanium nitride
CA Beaudette, JT Held, BL Greenberg… - Journal of Vacuum …, 2020 - pubs.aip.org
The authors produce plasmonic ZnO-TiN nanocomposite films by depositing plasma-
synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal …
synthesized ZnO nanocrystals onto a substrate and then by infilling the nanocrystal …
[HTML][HTML] Synthesis, structural and thermal characterisation of titanium silylamido complexes
SD Cosham, AL Johnson, G Kociok-Köhn… - Journal of Organometallic …, 2014 - Elsevier
The titanium silylamido complexes [{R 2 Si (N t Bu) 2} 2 Ti](R= Me (3) and R= Ph (4)),[{(R 2
Si (N t Bu) 2) Ti (μ 2-N t Bu)} 2](R= Me (5) and R= Ph (6) have been synthesised from the …
Si (N t Bu) 2) Ti (μ 2-N t Bu)} 2](R= Me (5) and R= Ph (6) have been synthesised from the …
Sustainable fabrication of protective nanoscale TiN thin film on a metal substrate by using automotive waste plastics
S Yin, R Rajarao, C Kong, Y Wang… - ACS Sustainable …, 2017 - ACS Publications
Automotive plastics are heterogeneous and complex mixtures of various plastics
incorporated with significant amounts of additives and fillers. Automotive shredded residue …
incorporated with significant amounts of additives and fillers. Automotive shredded residue …