Isotope effects on plasma species of Ar/H2/D2 plasmas
N Fox-Lyon, GS Oehrlein - Journal of Vacuum Science & Technology B, 2014 - pubs.aip.org
The authors studied the influence of isotopes on the Ar/H 2 and Ar/D 2 plasmas using
Langmuir probe and ion mass analyzer measurements at several pressures relevant to low …
Langmuir probe and ion mass analyzer measurements at several pressures relevant to low …