High-Bandwidth Repetitive Trajectory Tracking Control of Piezoelectric Actuators via Phase–Hysteresis Hybrid Compensation and Feedforward–Feedback Combined …
Piezoelectric actuators (PEAs) are widely used in many nano-resolution manipulations. A
PEA's hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature …
PEA's hysteresis becomes the main factor limiting its motion accuracy. The distinctive feature …
Atomic Force Microscope Vertical Feedback Control Strategy for Semi-Automated Long-Range Probe Landing
Traditional Atomic Force Microscopes (AFM) allow a short range displacement of the AFM
probe, on the order of several tens of micrometers. When used inside an Electron …
probe, on the order of several tens of micrometers. When used inside an Electron …
Robotic Mosaic Atomic Force Microscopy Through Sequential Imaging and Multiview Iterative Closest Points Method
This paper presents a functionality that has been developed for the home-made AFM-in-
SEM robotic system at the ISIR laboratory. The method allows extending the range of an …
SEM robotic system at the ISIR laboratory. The method allows extending the range of an …
A Micro-Robotic Approach for The Correction of Angular Deviations in AFM Samples From Generic Topographic Data
This article proposes a method for the correction of angular deviations caused during the
fixing process of samples prepared for Atomic Force Microscopy (AFM). The correction is …
fixing process of samples prepared for Atomic Force Microscopy (AFM). The correction is …
Path Following Control of an Atomic Force Microscope Driven by a Piezoelectric Inertia Actuated Robot Inside a Scanning Electron Microscope
Path following control of micrometer-sized tools is the key to improve automation capabilities
at the small scales. This paper addresses the issue of path following control for piezoelectric …
at the small scales. This paper addresses the issue of path following control for piezoelectric …