A MEMS low-noise sound pressure gradient microphone with capacitive sensing

RN Miles, W Cui, QT Su… - Journal of …, 2014 - ieeexplore.ieee.org
A silicon microelectromechanical systems microphone is described that detects sound
pressure gradients. The diaphragm consists of a stiffened plate that rotates around a central …

[HTML][HTML] Sound source localization inspired by the ears of the Ormia ochracea

ML Kuntzman, NA Hall - Applied Physics Letters, 2014 - pubs.aip.org
The parasitoid fly Ormia ochracea has the remarkable ability to locate crickets using audible
sound. This ability is, in fact, remarkable as the fly's hearing mechanism spans only 1.5 mm …

Micromachined in-plane pressure-gradient piezoelectric microphones

ML Kuntzman, NN Hewa-Kasakarage… - IEEE Sensors …, 2014 - ieeexplore.ieee.org
This paper presents the fabrication, modeling, and characterization of a micromachined
piezoelectric directional microphone. The microphone structure consists of a 20-μm-thick …

Micropower mixed-signal VLSI independent component analysis for gradient flow acoustic source separation

M Stanaćević, S Li… - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
A parallel micropower mixed-signal VLSI implementation of independent component
analysis (ICA) with reconfigurable outer-product learning rules is presented. With the …

A small cavity for detecting sound-induced flow

J Lai, Z Liu, M Karimi, M Farahikia, W Cui… - The Journal of the …, 2025 - pubs.aip.org
A study is presented of a method for creating an acoustic flow sensor that is generally
compatible with current silicon microfabrication processes. An aim of this effort is to obtain a …

Microelectromechanical systems for biomimetical applications

R Latif, E Mastropaolo, A Bunting, R Cheung… - Journal of Vacuum …, 2010 - pubs.aip.org
An etch release process capable of releasing long resonant gate transistor bridges from a
sacrificial layer has been studied as a step towards developing a system to mimic the …

Micromachined in-plane acoustic pressure gradient sensors

ML Kuntzman - 2014 - repositories.lib.utexas.edu
This work presents the fabrication, modeling, and characterization of two first-generation
acoustic in-plane pressure gradient sensors. The first is a micromachined piezoelectric …

A transmission-line model of back-cavity dynamics for in-plane pressure-differential microphones

D Kim, ML Kuntzman, NA Hall - The Journal of the Acoustical Society …, 2014 - pubs.aip.org
Pressure-differential microphones inspired by the hearing mechanism of a special parasitoid
fly have been described previously. The designs employ a beam structure that rotates about …

Enhanced directional sensitivity of a biomimetic MEMS acoustic localization sensor

D Gee, H Liu, L Currano, M Yu - … /Microstructures for Sensing II, 2010 - spiedigitallibrary.org
We present an improved microfabricated sound localization sensor for unobtrusive
surveillance systems inspired by the tympanic membranes of the parasitoid fly, Ormia …

Directional hearing at the micro-scale: bio-inspired sound localization

A Reid - 2017 - stax.strath.ac.uk
Miniaturization of sound localization sensors arrays is heavily constrained by the limited
directional cues in intensity difference and phase difference available at the microscale …