A review of actuation and sensing mechanisms in MEMS-based sensor devices
Over the last couple of decades, the advancement in Microelectromechanical System
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …
(MEMS) devices is highly demanded for integrating the economically miniaturized sensors …
Fabrication and characterization of a CMOS-MEMS humidity sensor
This paper reports on the fabrication and characterization of a Complementary Metal Oxide
Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded …
Semiconductor-Microelectromechanical System (CMOS-MEMS) device with embedded …
Design, preparation, and reliability testing of low‐cost 3D‐printed ABS scanner
C Li, S Chen, S Xu - Journal of Polymer Science, 2023 - Wiley Online Library
Scanning mirrors can deflect, reflect, and pattern the laser beam. Traditional laser
galvanometers rely on deflection motors and mirrors, which are bulky and costly. Micro …
galvanometers rely on deflection motors and mirrors, which are bulky and costly. Micro …
Rapid and sensitive detection of severe acute respiratory syndrome coronavirus 2 in label-free manner using micromechanical sensors
Coronavirus (COVID-19), caused by the severe acute respiratory syndrome coronavirus 2
(SARS-CoV-2), has been identified as a deadly pandemic. The genomic analysis of SARS …
(SARS-CoV-2), has been identified as a deadly pandemic. The genomic analysis of SARS …
Observation of CO detection using aluminum-doped ZnO nanorods on microcantilever
An oscillating piezoresistive microcantilever (MC) coated with an aluminum (Al)-doped zinc
oxide (ZnO) nanorods was used to detect carbon monoxide (CO) in air at room temperature …
oxide (ZnO) nanorods was used to detect carbon monoxide (CO) in air at room temperature …
Metal Microelectromechanical Resonator Exhibiting Fast Human Activity Detection
This work presents a MEMS resonator used as an ultra-high resolution water vapor sensor
(humidity sensing) to detect human activity through finger movement as a demonstrator …
(humidity sensing) to detect human activity through finger movement as a demonstrator …
Influence of water vapor on CO detection using a resonant microcantilever functionalized by Al-doped ZnO nanorods
A microcantilever (MC) coated by Al-doped ZnO nanorods (AZNRs) was used for carbon
monoxide (CO) detection at ambient temperature. Very high sensitivity (on the order of …
monoxide (CO) detection at ambient temperature. Very high sensitivity (on the order of …
CO Gas‐Induced Resonance Frequency Shift of ZnO‐Functionalized Microcantilever in Humid Air
Resonance frequency shift of a zinc oxide‐(ZnO‐) functionalized microcantilever as a
response to carbon monoxide (CO) gas has been investigated. Here, ZnO microrods were …
response to carbon monoxide (CO) gas has been investigated. Here, ZnO microrods were …
Piezoresistive microcantilever-based gas sensor using dynamic mode measurement
The purpose of this paper is to investigate an application of a piezoresistive microcantilever
for gas sensor using a dynamic mode operation. The working principle of the microcantilever …
for gas sensor using a dynamic mode operation. The working principle of the microcantilever …
Observation of chemicals evaporation (ethanol, methanol and 2-propanol) using vibrated microcantilever
Microcantilever is a device of MEMS (microelectro-mechanical system) which can be used
as a bio-chemical sensor, such as to determine the characteristics of chemical liquids. In this …
as a bio-chemical sensor, such as to determine the characteristics of chemical liquids. In this …