MEMS-based oscillators are an emerging class of highly miniaturized, batch manufacturable
timing devices that can rival the electrical performance of well-established quartz-based …

With the anticipation for a more connected world through the Internet of Things, there is still a
strong demand for miniaturized chemical sensors. Here, we report on a miniaturized …

This paper introduces the resonant body transistor (RBT), a silicon-based dielectrically
transduced nanoelectromechanical (NEM) resonator embedding a sense transistor directly …

This paper investigates electrostatic transduction of a longitudinal-mode silicon acoustic
resonator with internal dielectric films. Geometric optimization of internal dielectrically …

This paper presents experimental verification of frequency scaling in an internal dielectric
transduced resonator. A silicon bar resonator is excited in its 3 rd and 9 th longitudinal …

This paper presents unreleased CMOS-integrated MEMS resonators fabricated at the
transistor level of IBM's 32SOI technology and realized without the need for any …

Diamond integrated photonic devices are promising candidates for emerging applications in
nanophotonics and quantum optics. Here, we demonstrate active modulation of diamond …

We report on the design, fabrication and characterization of piezoelectrically actuated single-
crystal silicon plate resonators vibrating mainly in their bulk acoustic wave modes. Two …

Using fine electromagnetic signals to measure observables of other fields like curvature and
torsion of a space, and the corresponding value of their integrals of the action of perception …

The purpose of this dissertation is to introduce a new class of micromachined devices called
thin-film piezoelectric-on-substrate (TPoS) resonators and to study the performance of these …