Deformation investigation of electromagnetic diaphragm pump rubber diaphragm

Y Liao, H Wang, B Chen, Y Liu - PloS one, 2024 - journals.plos.org
A diaphragm pump is a type of volumetric pump that has excellent sealing performance. An
electromagnetic diaphragm pump is a kind of widely adopted diaphragm pump that has a …

Micro-fabricated presure sensor using 50 nm-Thick of Pd-based Metallic Glass freestanding membrane

N Van Toan, TTK Tuoi, YC Tsai, YC Lin, T Ono - Scientific Reports, 2020 - nature.com
This paper reports on micro-fabricated pressure sensors based on a thin metallic glass
membrane. The Pd66Cu4Si30 metallic glass material is deposited successfully by a sputter …

Influence of the pressure range on temperature coefficient of resistivity (TCR) for polysilicon piezoresistive MEMS pressure sensor

K Singh, PA Alvi - Physica Scripta, 2020 - iopscience.iop.org
Sensitivity with respect to physical change of any type of sensor depends upon structure of
the sensor and sensing material. If sensor is sensitive with more than single physical change …

Finite element analysis of polysilicon based MEMS temperature-pressure sensor

K Singh, PA Alvi - Materials Today: Proceedings, 2020 - Elsevier
Temperature and pressure sensor, both are in high demand for industrial application but to
use pressure sensor in harsh environment is a challenging task. As many of the …

Influence of Pressure on TCR of Polysilicon Piezoresistive Sensor

K Singh, PA Alvi - 2020 International Conference on …, 2020 - ieeexplore.ieee.org
Temperature based pressure sensor is much needed to be used in hot environment but
many of the electronic devices have little tolerance for heat. However, high temperature …

State of Art for Virtual Fabrication of Piezoresistive MEMS Pressure Sensor

PA Alvi - Electrical and Electronic Devices, Circuits and …, 2021 - taylorfrancis.com
Numerous challenges are associated with the fabrication process of the
microelectromechanical system (MEMS) pressure sensor. Selecting the best suitable …