Inverted pyramidal texturing of silicon through blisters in silicon nitride
SS Saseendran, A Kottantharayil - IEEE Journal of …, 2015 - ieeexplore.ieee.org
We have demonstrated a novel process for the fabrication of inverted pyramidal structures
on silicon. The proposed technique uses no photolithography step and is instead replaced …
on silicon. The proposed technique uses no photolithography step and is instead replaced …