When designing a new nanostructure or microstructure, one can follow a processing‐based
manufacturing pathway, in which the structure properties are defined based on the …

It's critically important to construct arbitrary inorganic features with high resolution. As an
inorganic photoresist, hydrogen silsesquioxane (HSQ) has been patterned by irradiation …

The semiconductor industry has already entered the sub-10 nm region, which has led to the
development of cutting-edge fabrication tools. However, there are other factors that hinder …

In this paper, 3D volumetric energy deposition and local crosslinking of hydrogen
silsesquioxane (HSQ) are experimentally and numerically explored in focused helium ion …

We propose the direction-tunable chiral photonic propagation of spontaneous emission
based on magnetic helicity and finite-size effect in a topological honeycomb photonic crystal …

Three-dimensional complete photonic bandgap materials or photonic crystals block light
propagation in all directions. The rod-connected diamond structure exhibits the largest …

Distribution of multimaterials at arbitrary positions with nanoscale resolution and over a
large area substrate is essential to future advances in functional graded materials. Such …

Nanofluidics show great promise for the control of small volumes and single molecules,
especially for biological and energy applications. To build up more and more complex …

In this work, the authors developed two processes for fabricating three-dimensional (3D)
nanostructures using a hydrogen silsesquioxane and poly (methylmethacrylate) bilayer …

A reproducible wafer-scale method to obtain 3D nanostructures using a low-budget
lithography tool is investigated. This method, called corner lithography, explores the …