Bimolecular Reaction Mechanism in the Amido Complex-Based Atomic Layer Deposition of HfO2
G D'acunto, R Tsyshevsky, P Shayesteh… - Chemistry of …, 2023 - ACS Publications
The surface chemistry of the initial growth during the first or first few precursor cycles in
atomic layer deposition is decisive for how the growth proceeds later on and thus for the …
atomic layer deposition is decisive for how the growth proceeds later on and thus for the …
Atomic and Molecular Layer Deposition of Functional Thin Films Based on Rare Earth Elements
High‐quality rare earth element (R) based thin films are in demand for applications ranging
from (opto) electronics and energy conversion/storage to medical diagnostics, imaging and …
from (opto) electronics and energy conversion/storage to medical diagnostics, imaging and …
Real-time artificial intelligence enhanced defect engineering in CeO2 nanostructures
CeO 2 nanostructures have been utilized for various biomedical, sensor, and catalysis
applications owing to their unique defect structure, enabling them to have regenerative …
applications owing to their unique defect structure, enabling them to have regenerative …
SILAR deposited antiviral silver-doped ceria nano-films
Amid the COVID-19 global pandemic, ceria nanomaterials (CN) have garnered renewed
interest as potential antiviral agents due to their ability to generate reactive oxygen species …
interest as potential antiviral agents due to their ability to generate reactive oxygen species …
In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
We investigate the time evolution of ZnO thin film growth in oxygen plasma-enhanced atomic
layer deposition using in situ spectroscopic ellipsometry. The recently proposed dynamic …
layer deposition using in situ spectroscopic ellipsometry. The recently proposed dynamic …
Ceria Defect Engineering Using Thin-Films/ALD and Biological applications
U Kumar - 2022 - stars.library.ucf.edu
Ceria nanostructures have been utilized for various engineering applications due to their
unique defect structure, enabling them to have regenerative redox properties. The ability to …
unique defect structure, enabling them to have regenerative redox properties. The ability to …