Design and simulation of MEMS-actuated adjustable optical wedge for laser beam scanners
This paper introduces both optical and mechanical design and simulation of large static
deflection MOEMS actuator. The designed device is in the form of an adjustable optical …
deflection MOEMS actuator. The designed device is in the form of an adjustable optical …
[PDF][PDF] Electrostatic MOEMS-based Refractive Laser Beam Steering for Imaging Applications
CEASB Abdelaziz - 2018 - researchgate.net
This thesis introduces a study of various types of Microoptoelectromechanical systems
(MOEMS) electrostatic vertical actuators. A study of the different MOEMS based laser beam …
(MOEMS) electrostatic vertical actuators. A study of the different MOEMS based laser beam …