Additive manufacturing, often known as 3D printing, is a type of digital fabrication technique
that builds physical items from a geometrical model through the addition of materials. The …

Atomic layer deposition (ALD) is a thin-film fabrication technique that has great potential in
nanofabrication. Based on its self-limiting surface reactions, ALD has excellent conformality …

This review provides an overview of area-selective thin film deposition (ASD) with a primary
focus on vapor-phase thin film formation via chemical vapor deposition (CVD) and atomic …

Atomic layer deposition (ALD) is a powerful tool for achieving atomic level control in the
deposition of thin films. However, several physical and chemical phenomena can occur …

Atomic-scale precision alignment is a bottleneck in the fabrication of next-generation
nanoelectronics. In this study, a redox-coupled inherently selective atomic layer deposition …

Conductive and semiconductive oxides constitute a class of materials of which the electrical
conductivity and optical transparency can be modulated through material design (eg, doping …

The chemical approaches enabling selective atomic layer deposition (ALD) are gaining
growing interest. The selective ALD has unlocked attractive avenues for the development of …

Experiment and density functional theory (DFT) are combined to study the selective growth
of Al2O3 with methanesulfonic acid (MSA) as a small molecule inhibitor (SMI) for Cu. Two …

Area‐selective atomic layer deposition (AS‐ALD) offers tremendous advantages in
comparison with conventional top‐down patterning processes that atomic‐level selective …

In the past decades, Moore's law drives the semiconductor industry to continuously shrink
the critical size of transistors down to 7 nm. As transistors further downscaling to smaller …