[HTML][HTML] Hierarchical Micro/Nanostructures with Anti-Reflection and Superhydrophobicity on the Silicon Surface Fabricated by Femtosecond Laser
J Duan, G Long, X Xu, W Liu, C Li, L Chen, J Zhang… - Micromachines, 2024 - mdpi.com
In this paper, hierarchical micro/nano structures composed of periodic microstructures, laser-
induced periodic surface structures (LIPSS), and nanoparticles were fabricated by …
induced periodic surface structures (LIPSS), and nanoparticles were fabricated by …