We demonstrate a platform for phase and amplitude modulation in silicon nitride photonic
integrated circuits via piezo-optomechanical coupling using tightly mechanically coupled …

This study demonstrates a monolithic 1 x 4 optical switch composed of a planar micro-
electro-mechanical system (MEMS) integrated with silicon nitride (SiN) waveguides. The …

This work describes a novel micromechanical structure capable of producing out-of-plane
motion from in-plane forces generated by electrostatic microelectromechanical system …

Alignment is critical for efficient integration of photonic integrated circuits (PICs), and
microelectromechanical systems (MEMS) actuators have shown potential to tackle this …

Integrating microelectromechanical systems (MEMS) actuators with low-loss suspended
silicon nitride waveguides enables the precise alignment of these waveguides to other …

This work demonstrates a hybrid MEMS actuator platform that combines electrostatic and
piezoelectric actuators to displace a suspended MEMS platform along 3 degrees-of-freedom …

A design of electrostatically tunable metamaterial is proposed in the terahertz (THz)
frequency range using electric split-ring resonators (eSRR), which shows polarization …

We present a 1× 3 optical switch based on a translational microelectromechanical system
(MEMS) platform with integrated silicon nitride (SiN) photonic waveguides. The fabricated …

We present the concept and design of a novel integrated optical spectrometer able to
operate over four different optical bands in the infrared that cover over 900? nm of …

This work presents novel multi degrees-of-freedom (DOF) actuators based on piezoelectric
and electrostatic actuation to generate both in-plane and out-of-plane motions, intended to …