Modeling and experimental studies of mutual acoustic radiation effect on PMUT array

L Zhao, J Xia, C Yang, Y Lu - Sensors and Actuators A: Physical, 2024 - Elsevier
Piezoelectric micromachined ultrasonic transducers (PMUTs) are widely used for ultrasound
imaging and sensing applications that require broad bandwidth. A single PMUT is normally …

Fabrication of linear array and top-orthogonal-to-bottom electrode CMUT arrays with a sacrificial release process

BA Greenlay, RJ Zemp - IEEE transactions on ultrasonics …, 2016 - ieeexplore.ieee.org
The microfabrication processes for sacrificial-release-based capacitive micromachined
ultrasound transducer arrays are provided with an emphasis on top-orthogonal-to-bottom …

A nonlinear lumped equivalent circuit model for a single uncollapsed square CMUT cell

M Maadi, RJ Zemp - IEEE transactions on ultrasonics …, 2019 - ieeexplore.ieee.org
An accurate nonlinear lumped equivalent circuit model is used for modeling of capacitive
micromachined ultrasonic transducers (CMUTs). Finite-element analysis (FEA) is a powerful …

Self and mutual radiation impedances for modeling of multi-frequency CMUT arrays

M Maadi, RJ Zemp - IEEE transactions on ultrasonics …, 2016 - ieeexplore.ieee.org
Multi-frequency capacitive micromachined ultrasonic transducers (CMUTs) consist of
interlaced large and small membranes for multiband operation. In modeling these devices …

Radiation efficiency of a distribution of baffled pistons with arbitrary phases

C García A, N Dauchez, G Lefebvre - The Journal of the Acoustical …, 2022 - pubs.aip.org
The radiation resistance and efficiency of a collection of circular pistons, randomly placed on
a plane and vibrating with arbitrary phases, are expressed as a combination of the self-and …

Multi-frequency CMUT imaging arrays for multi-scale imaging and imaging-therapy applications

M Maadi, B Greenlay, C Ceroici… - 2017 IEEE International …, 2017 - ieeexplore.ieee.org
Large and small CMUT membranes were fabricated in an interlaced fashion to create a multi-
frequency array using a modified standard silicon-nitride sacrificial release process on a …

Modelling of large-scale multi-frequency CMUT arrays with circular membranes

M Maadi, RJ Zemp - 2016 IEEE International Ultrasonics …, 2016 - ieeexplore.ieee.org
Large-scale multi-frequency capacitive micromachined ultrasonic transducer (CMUT) arrays
consist of thousands of closely packed interlaced large and small membranes for …

[PDF][PDF] Fabrication of Linear Array and Top-Orthogonal-to-Bottom Electrode (TOBE) CMUT Arrays with a Sacrificial Release Process

B Greenlay, R Zemp - academia.edu
The microfabrication processes for sacrificial-release based capacitive micromachined
ultrasound transducer (CMUT) arrays are provided with an emphasis on toporthogonal-to …

A nonlinear large signal equivalent circuit model for a square CMUT cell

M Maadi, RJ Zemp - 2017 IEEE International Ultrasonics …, 2017 - ieeexplore.ieee.org
Using analytical calculations, a precise large signal equivalent circuit model of square
CMUT dynamics was developed. The model predicts many intrinsic properties of a square …