The advent of glass-based microfluidic devices further revolutionized in microfluidic
technology due to the several advantageous properties in terms of photonics, electronics …

Complex fluid flow in porous media is ubiquitous in many natural and industrial processes.
Direct visualization of the fluid structure and flow dynamics is critical for understanding and …

Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a
comprehensive guide to MEMS materials, technologies, and manufacturing with a particular …

This paper describes the main protocols that are used for fabricating microfluidic devices
from glass and silicon. Methods for micropatterning glass and silicon are surveyed, and their …

Microchannels are the main features that characterize microfluidic devices. Also, glass is
given priority in selecting a substrate material in the development of microfluidic devices due …

In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

The application of microfabrication to the development of biomedical implants has produced
a new generation of miniaturized technology for assisting treatment and research …

This chapter discusses reactive ion etching (RIE) and deep RIE (DRIE) on wafers detailing
the various equipment and reactor requirements for different applications. The Bosch …

Microchannels are primarily used in biomedical devices and microfluidic applications.
Fabrication of microchannels has always been a tough task using conventional …

Glass micromachining is currently becoming essential for the fabrication of micro-devices,
including micro-optical-electro-mechanical-systems (MOEMS), miniaturized total analysis …