Hydrocarbon contamination is associated with light transmission losses in modern lithography machines, which contain extreme-ultraviolet-induced plasma. A volume …
A microwave induced coaxial surface wave discharge with a feeding gas mixture of oxygen and hexamethyldisiloxane used for the deposition of polymer coatings is numerically …
Vibrational levels of molecular oxygen, O 2 (v< 42), are investigated in continuous and pulse- modulated low-pressure radio-frequency oxygen plasma with a global modelling approach …
Zero-dimensional simulations of DC ns-pulsed plasma jet in N2 at near atmospheric pressure: validation of the vibrational kinetics - IOPscience Skip to content IOP Science home Accessibility …
E Kemaneci, F Mitschker, M Rudolph… - Journal of Physics D …, 2017 - iopscience.iop.org
A volume-averaged global model is developed to investigate surface-wave discharges inside either cylindrical or coaxial structures. The neutral and ion wall flux is self-consistently …
Transport and radiative properties of complex molecular plasmas are investigated via numerical modeling. A significant part of this work is devoted to the study of high pressure …
E Kemaneci, E Carbone, M Jimenez-Diaz… - Journal of Physics D …, 2015 - iopscience.iop.org
A microwave-induced oxygen plasma is simulated using both stationary and time-resolved modelling strategies. The stationary model is spatially resolved and it is self-consistently …
A plasma model is usually comprised of a set of coupled differential equations. These equations represent space-and time-dependent balance equations for the species' mass …
In this section, we describe a model that computes the spatially resolved electromagnetic fields. The model forms one of the electromagnetic modules in Plasimo and it is employed in …