This review surveys micromachined gyroscope structure and circuitry technology. The
principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS …

The MEMS gyroscope by means of oven control, or the so-called ovenized MEMS
gyroscope, isolates the die from the external environment and utilizes a closed-loop …

A comprehensive review of the modeling approaches used to simulate the behaviors of
micro/nano-gyroscopes is presented. The performance and sensitivity of these inertial …

This paper presents the design and analysis of a multi degree of freedom (DOF) electro-
thermally actuated non-resonant MEMS gyroscope with a 3-DOF drive mode and 1-DOF …

MEMS (micro electrical mechanical systems) gyroscopes are used to measure the angular
rate in several applications. The performance of a MEMS gyroscope is dependent on more …

Microhotplate (MHP) based gas sensors have gained significant attention recently due to
their small size, low power and feasibility for integration of electronics on the same chip. This …

Microcantilevers are extensively used in Micro Electro Mechanical Systems for a variety of
sensing applications. This study presents the modeling, design and simulation of …

This thesis presents the quasi-static acceleration compensation methods for a fully
decoupled MEMS gyroscope. These methods are based on the utilization of the amplitude …

The constant need of improving performance of transducers has pushed scientists to
searching novel solutions in transduction mechanisms. The development of theories about …

High force and large displacement at the low actuation voltage is the primary concern for the
micro actuators to be used for microelectromechanical systems (MEMS) based devices. The …