There is an indispensable need for fluid flow rate and direction sensors in various medical,
industrial and environmental applications. Besides the critical demands on sensing range of …

Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

This article presents a complementary metal-oxide semiconductor (CMOS)-
microelectromechanical system (MEMS) monolithic integrated thermal flow sensor system …

This paper describes the design and development of low power Micro Electro Mechanical
Systems (MEMS) microheater and metal oxide semiconductor CO 2 sensor. To achieve low …

This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-
digital converter (DC) that can be used with both liquids and gases. It consists of a …

In this study, an ultraslim thermal flow sensor system integrated onto a 340 μm diameter
medical guidewire was developed using a laser filament scanning sintering method for the …

Microelectromechanical systems (MEMSs) are microdevices fabricated using semiconductor-
fabrication technology, especially those with moving components. This technology has …

We present a system-level model with an on-chip temperature compensation technique for a
CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses …

The ongoing vivid advance in integration technologies is giving leverage both to computing
systems as well as to sensors and sensor systems. Both conventional computing systems as …

We present a compact, versatile Hall readout system with digital output, fully integrated in
180nm technology. The core of the system is an instrumentation amplifier architecture that …